The article title

A.A. Ivanov1, A.B. Petrov*,2, B.C. Sidorov3 The speaker's name must be underlined

1 Institute for Automation and Control Processes, 5 Radio St., Vladivostok 690041, Russia

2 Institute of Semiconductor Physics of SB RAS, 13 pr. Lavrentieva, Novosibirsk 630090, Russia

3 Far Eastern Federal University, 8 Sukhanova St., Vladivostok 690950, Russia

*e-mail: corresponding_autor_mail@gmail.com

Abstract. Place here the abstract of your article. It must be no more than 150 word. Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text Abstract text.

1. Introduction

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2. Experiment

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Table I. Parameters of Samples

Sample	Substrate	Implanted dose, (cm-2)	Conduc-tivity type	Resistivity, (Ohm cm)
A	Si(111)	1016	p	20
B	Si(111)	1.8×1017	p	20
C	Si(100)	1015	n	4.5
D	Si(100)	1016	n	4.5
E	Si(100)	1.8×1017	n	4.5

3. Results and discussions

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Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text

Fig. 1. Photoluminescence spectra of sample D. There is a red shift of the peak position with increasing of temperature.

Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body textBody text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text

Fig. 2. Bright-field TEM image of the Cr-implanted Si layer ( = 31016 cm-2) after PLA (W = 1.6 J/cm2).

Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text Body text

4. Conclusions

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Acknowledgements

Place your acknowledgements here

References

K. Oyoshi, D. Lenssen, R. Carrius, S. Mantl. Thin Solid Films 381(2001)194.

T. Suemasu, T. Fujii, K. Takakura, F. Hasegawa. Thin Solid Films 381(2001)209.

R. Bayazitov, R. Batalov, R. Nurutdinov, V. Shustov, P. Gaiduk, I. Dezsi, E. Kotai. Nucl. Instr. Meth. B 24(2005)224.

K. Oyoshi, D. Lenssen, R. Carius, S. Mantl. Thin Solid Films 381(2001)202

J. Chrost, J. J. Hinarejos, E. G. Michel, R. Miranda. Surf. Sci. 330(1995)34.